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Centre of Nanotechnology

Cleanroom Class-100

1. Field Emission Scanning Electron Microscope (FESEM)
2. Mask Writer (Model: Dilase 250)
3. Double sided Mask Aligner (Model: EVG620NT)

Cleanroom Class-1000

1. RF Magetron Sputtering (Model: QPREP400)
2. Thermal evaporator
3. Plasma-Enhanced Chemical Vapor Deposition
4. Reactive Ion Etching
5. Electro Spinning Device (Model: Super ES-2)
6. Laser Micro-Machining (Model: Clark MXR Inc,Impulse Laser)

Electrical Characterisation

1. DC Probe (Station Model: CPX100)
2. Cryogenic Probe station
3. Pulsed Laser Deposition (Model: Excel Instrument)

Material Characterization

1. Raman (Model: CPX100)
2. Molecular Printing System (Model: Bioforce Nano eNabler 5.02)
3. Wire bonder (Model: HB16)

Optical Characterization

1. Confocal (Model: JSM-7610F)

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